Ua hoʻololi ka LED kuʻuna i ke kahua o ke kukui a me ka hōʻike ma muli o kā lākou hana kiʻekiʻe ma ke ʻano o ka pono, ke kūpaʻa a me ka nui o ka hāmeʻa. ʻO nā LED he mau puʻu o nā kiʻiʻoniʻoni semiconductor lahilahi me nā ana ʻaoʻao o millimeters, ʻoi aku ka liʻiliʻi ma mua o nā hāmeʻa kuʻuna e like me nā kukui incandescent a me nā paipu cathode. Eia nō naʻe, ʻo nā noi optoelectronic e kū mai ana, e like me ka virtual a me ka hoʻonui ʻia, koi i nā LED i ka nui o nā microns a i ʻole ka liʻiliʻi. ʻO ka manaʻolana ʻo ka micro - a i ʻole submicron scale LED (µleds) e hoʻomau i ka loaʻa ʻana o nā ʻano maikaʻi he nui i loaʻa i nā leds kuʻuna, e like me ka hoʻokuʻu paʻa loa, ka pono kiʻekiʻe a me ka ʻōlinolino, ka hoʻohana ʻana i ka mana haʻahaʻa loa, a me ka hoʻokuʻu kala piha, ʻoiai he miliona mau manawa ka liʻiliʻi ma ka wahi, e ʻae ana i nā hōʻikeʻike liʻiliʻi. Hiki i kēlā mau ʻāpana alakaʻi ke hoʻomākaukau i ke ala no nā kaapuni photonic ikaika inā hiki ke ulu ʻia i hoʻokahi chip ma Si a hoʻohui ʻia me nā mea uila semiconductor oxide complementary (CMOS).
Eia nō naʻe, a hiki i kēia manawa, ua paʻakikī ke ʻike ʻia kēlā mau µleds, ʻoiai ma ka pae nalu hoʻokuʻu ʻōmaʻomaʻo a ʻulaʻula. ʻO ke ʻano kuʻuna o ka led µ-led he hana mai luna a lalo kahi e kālai ʻia ai nā kiʻiʻoniʻoni InGaN quantum well (QW) i loko o nā mea hana micro-scale ma o ke kaʻina hana etching. ʻOiai ua huki nui ʻia ka nānā ʻana o nā tio2 µleds thin-film InGaN QW-based ma muli o nā waiwai maikaʻi loa o InGaN, e like me ka lawe ʻana i ka mea lawe a me ka tunability wavelength ma o ka pae ʻike ʻia, a hiki i kēia manawa ua hoʻopilikia ʻia lākou e nā pilikia e like me ka hōʻino ʻana o ka ʻaoʻao-paia e ʻoi aku ka ʻino i ka wā e emi ai ka nui o ka mea hana. Eia kekahi, ma muli o ke ola ʻana o nā kahua polarization, loaʻa iā lākou ka wavelength/color instability. No kēia pilikia, ua hāpai ʻia nā hoʻonā non-polar a me semi-polar InGaN a me nā photonic crystal cavity, akā ʻaʻole lākou i māʻona i kēia manawa.
Ma kahi pepa hou i paʻi ʻia ma Light Science and Applications, ua hoʻomohala nā mea noiʻi i alakaʻi ʻia e Zetian Mi, he polopeka ma ke Kulanui o Michigan, ʻo Annabel, i kahi LED ʻōmaʻomaʻo submicron scale iii - nitride e lanakila ai i kēia mau pilikia i hoʻokahi manawa a no nā mea a pau. Ua synthesized ʻia kēia mau µled e ka epitaxy beam molecular plasma-assisted selective regional. I ka ʻokoʻa loa i ke ʻano kuʻuna o luna-i lalo, ʻo ka µled ma aneʻi he ʻano o nā nanowires, ʻo kēlā me kēia he 100 a 200 nm wale nō ke anawaena, i hoʻokaʻawale ʻia e nā ʻumi nanometers. ʻO kēia ʻano lalo-i luna e pale aku i ka hōʻino ʻana o ka pā lateral corrosion.
ʻO ka ʻāpana hoʻomālamalama o ka hāmeʻa, i ʻike ʻia hoʻi ʻo ka ʻāpana hana, ua haku ʻia me nā ʻano lua quantum multiple core-shell (MQW) i hōʻike ʻia e ke ʻano nanowire. ʻO ka MQW, aia ka lua InGaN a me ka pale AlGaN. Ma muli o nā ʻokoʻa o ka neʻe ʻana o ka atom adsorbed o nā mea Group III indium, gallium a me ka alumini ma nā paia ʻaoʻao, ua ʻike mākou ua nalowale ka indium ma nā paia ʻaoʻao o nā nanowires, kahi i kāʻei ai ka pūpū GaN/AlGaN i ka MQW core e like me ka burrito. Ua ʻike nā mea noiʻi ua emi mālie ka ʻike Al o kēia pūpū GaN/AlGaN mai ka ʻaoʻao injection electron o nā nanowires a i ka ʻaoʻao injection hole. Ma muli o ka ʻokoʻa o nā kahua polarization kūloko o GaN a me AlN, ʻo ia ʻano gradient volume o ka ʻike Al ma ka papa AlGaN e hoʻoulu ai i nā electrons manuahi, kahi maʻalahi ke kahe i loko o ka MQW core a hōʻoluʻolu i ka paʻa ʻole o ke kala ma ka hōʻemi ʻana i ke kahua polarization.
ʻO kaʻoiaʻiʻo, ua ʻike nā mea noiʻi no nā mea hana i emi iho ma mua o hoʻokahi micron ke anawaena, ʻo ka nalu lōʻihi o ka electroluminescence, a i ʻole ka hoʻokuʻu ʻana o ke kukui i hoʻokomo ʻia e ke au, e mau ana ma ke kauoha o ka nui o ka loli o ka injection o ke au. Eia kekahi, ua hoʻomohala mua ka hui o Polofesa Mi i kahi ʻano hana no ka ulu ʻana i nā uhi GaN kiʻekiʻe ma ka silicon e ulu i nā leds nanowire ma ka silicon. No laila, noho kahi µled ma luna o kahi substrate Si i mākaukau no ka hoʻohui ʻana me nā mea uila CMOS ʻē aʻe.
He nui nā hoʻohana kūpono o kēia µled. E ʻoi aku ka ikaika o ka paepae hāmeʻa i ka wā e hoʻonui ʻia ai ka nalu hoʻokuʻu o ka hōʻike RGB i hoʻohui ʻia ma ka chip i ka ʻulaʻula.
Ka manawa hoʻouna: Ian-10-2023